D&M Vacuumsystemen B.V.

Toestand: klaar voor gebruik (gebruikt), Tested and in working condition Kdslhccqeuhcp Hotsi

Toestand: gebruikt, Controller TMP process kamer Controller TMP for wafer handler/10pos. cassette front loader 5KW DC power supply (AE) Kjlhccqouhcpyjtjdi 5kW RF power supply (Huettinger) Process pump Leybold D65 + 250/500 rootsblower Vacuum Handler for cassette system 1x 1000ls turbopomp Leybold 1x LN2 / meissner trap

Toestand: gebruikt, UHV deposition system (ebeam-sputter) UHV deposition system: Was used for deposition Titanium - Gold (ebeam) Ebeam deposition unit is removed Cryopump and prepump is removed Loadlock: for samples round 75mm Incl. sample heater 450l/s turbomolecular pump (Leybold) Proceschamber: Size: Width 680mm x Height 750mm x Depth 590mm Incl. shielding Double oring door (partially pumped) Heaters Basepressure low 10-7mbar, high 10-8mbar Electronics: Baseline cabinet (e-beam unit removed) Old PLC (for pump/vent) Gascabinet/water: Various valves/flowreducers for gas and water Kjlhcouhcn Nocqtodi Note: D&M Vacuumsystems can upgrade the system to new processes (E-beam or Sputter) incl. new electronics and software EUR 55.000,-

Toestand: gebruikt, Leybold A700 Q deposition system (ebeam) Leybold A700 deposition system: Was used for deposition Titanium - Gold (ebeam) Ebeam deposition unit (Leybold) Vacuum pump Leybold D40-65B + Diffusion pump 2kW Proceschamber: Size: Width 680mm x Height 680mm x Depth 550mm Substrateholder diameter 650mm Incl. shielding Oring door Heaters Basepressure low 10-6mbar Electronics: Baseline cabinet (eneeds upgrade) Old PLC (for pump/vent) Gascabinet/water: Various valves/flowreducers for gas and water Note: D&M Vacuumsystems can upgrade the system to new processes (E-beam or Sputter) incl. new electronics and software Kolhcouhcnijcqtodi EUR 37.500,-

Toestand: goed (gebruikt), Opportunity: 2x Pfeiffer Classic 590 available! Price: EUR 99.500/piece. Configuration Coater 1: 2x Pfeiffer TPH 2301 (2300ls) completely overhauled Pfeiffer DCU 600 2x VAT Throttle Valve 64048-pe48-ads2/0001 1x Pfeiffer PKR251 fullrange sensor Pfeiffer TPR280 for prevacuum Pfeiffer DUO 120 prepump (120m3/h) Vacuumchamber: for substrate size round 840mm incl shielding and spare shielding set 2x viewport Several feedthroughs Rotating feedthrough incl thermocouple Infrared heater Watermanifold plus valves Vacuumvalves for venting-pumpdown etc Notes: Currently used for Resistance Evaporation (no boats available) Current PLC and E-cabinet is removed due to IP. However: if required our company Orange Thin Films can do a complete refurbishment with Labview automation and new processes (such as Eeam-Sputtering-Evaporation etc) Configuration Coater 2: 2x Pfeiffer TPH 2201 s p c (horizontal turbo 2200ls) completely overhauled Pfeiffer DCU 600 2x VAT Throttle Valve 64048-pe48-ads2/0001 1x Pfeiffer PKR251 fullrange sensor Pfeiffer TPR280 for prevacuum Pfeiffer DUO 120 prepump (120m3/h) Vacuumchamber: for substrate size round 840mm incl shielding and spare shielding set 2x viewport Several feedthroughs Rotating feedthrough incl thermocouple Infrared heater Kdjlhjhwv Tfsccqtsi Watermanifold plus valves Vacuumvalves for venting-pumpdown etc Notes: Current used for Resistance Evaporation (no boats available) Current PLC and E-cabinet is removed due to IP. However: if required our company Orange Thin Films can do a complete refurbishment with Labview automation and new processes (such as Eeam-Sputtering-Evaporation etc)

Bouwjaar: 1989, Toestand: klaar voor gebruik (gebruikt), For the deposition of thin metallic layers in the nanometer range, of different materials, cathodes chrome and copper,1 chamber, rotating basket, pre-pump set, turbo pump, hot and cold water supply for heating and cooling of the plant, Cooling plant L&R Kältetechnik WHK-15-W, year of construction: 2004, High voltage source ADS Maris, Kolohwm Iijhccqtodi control cabinet, with control Siemens, complete plant control retrofit, year of construction: 2004

Toestand: als nieuw (gebruikt), Pfeiffer prisma plus Rga Kelhcced S Awneqtsdi 0-200amu incl SEM

Toestand: nieuw, New Aircooling kit Pfeiffer PM Z01 300 AT €100,-/pc Kjlhccqod Sz Dzjtjdi 15pcs available

Toestand: nieuw, Pfeiffer aircooling Kolhccjd Sz Dtoqtedi €100,-/pc 20pcs available PM Z01 363A

Toestand: als nieuw (gebruikt), Leybold wsu1001 Koled Sz Diohccqtedi

Toestand: als nieuw (gebruikt), Pfeiffer wkp2000 as Kdolhod Sz Dbjccqtsi

Toestand: als nieuw (gebruikt), Pfeiffer dbp 050 drypump Kelhcjd Sz Avjcqtedi

Toestand: als nieuw (gebruikt), Leybold Duradry 105 Kslhsd Sz Apjccqtodi

Toestand: als nieuw (gebruikt), Leybold Ecodry M Kelhccqjd Sz Aiotedi

Toestand: nieuw, Pfeiffer wkp1000 new in crate Kjlsd Szzrohccqtodi